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memoQ supports superscript and subscript formatting as it supports bold/italic/underline.

Use

You do not need Inline Tags anymore to represent superscript/subscript formatting. You can insert this formatting in clicking the superscript () and subscript () icons on the Edit ribbon tab.

The inserted formatting is visible in the segment as well as in the preview:

Note: When you export a MQXLIFF document from memoQ 2013 or higher which contains superscript and subscript formatting, and import this file in memoQ 6.2 or earlier, this formatting is represented in a mq:fmt Tag or ignored.